Outstanding functionality and scalability
easily handle emerging needs
Half the Footprint, 1.5 Times the
Equipped with three lenses in different resolutions.
A wafer pattern inspection system with high resolution and high productivity.
Advanced Scrubber Featuring the Same Stability and Reliability as the Highly Regarded SS Series.
Flexibility to Process a Variety of Substrates
_Spin Scrubber(Brush and Chemical Cleaning)