-
Spin Scrubber
SS-3300S
16 Processing Chambers For High Throughput Up To 1,000 WPH
-
Spin Scrubber（Brush and Chemical Cleaning）
SB-3300
Hybrid type cleaning system combining chemical etching/cleaning functions as well as a brush cleaning function
-
Single Wafer Cleaner
SU-3400
The Evolution of
the World's No. 1* Cleaning Equipment
* Based on SCREEN in-house research
-
Coat/Develop Track
DT-3000
SOKUDO DUO
High Productivity, >450 WPH Capable Dual Track System
Systems for leading-edge semiconductor devices
(300 mm)
Wafer Cleaning System
Wet Station
Spin Processor
Spin Scrubber
Spin Scrubber（Brush and Chemical Cleaning）
Polymer Removal
Coat/Develop Track
Annealing System
Measurement System
Inspection System
Advanced Packaging Lithography
Products
-
- Wafer Cleaning System
-
Wet Station
- Wet Station FC-3100
- Wet Station WS-620C/WS-820C/WS-820L
- Wet Station FC-821L
- Compact Wet Station CW-2000
Spin Processor
- Single Wafer Cleaner SU-3400
- Single Wafer Cleaner SU-3300
- Single Wafer Cleaner SU-3200
- Single Wafer Cleaner SU-2000
- Spin Processor SP-2100
Spin Scrubber
_Spin Scrubber(Brush and Chemical Cleaning)
-
- Annealing System
-
- Advanced Packaging Lithography