16 Processing Chambers For High Throughput Up To 1,000 WPH
Hybrid type cleaning system combining chemical etching/cleaning functions as well as a brush cleaning function
The Evolution of the World's No. 1* Cleaning Equipment * Based on SCREEN in-house research
SOKUDO DUO High Productivity, >450 WPH Capable Dual Track System
Wet Station
Spin Processor
Spin Scrubber
_Spin Scrubber(Brush and Chemical Cleaning)