● Green Products as a Percentage of Sales/Number of Certified Products
Green Products
Promoting Green Products
We are focused on expanding sales of products that are certified as “Green Products” according to SCREEN’s independent evaluation standards, thus offering such an excellent level of environmental performance as to contribute to CO2 emission reductions at our clients’ plant operations.
We evaluate each product in terms of energy saving, resource conservation, degree of disassembly, recycling, environmental protection and safety, and information availability on a scale of five, while seeking to minimize energy consumption associated with the product. We also added to our evaluation criteria the power consumption equivalent of exhaust, as well as ultrapure water, nitrogen and other utilities, reflecting the SEMI S231*1 definition of “equivalent energy”.
In addition, to further accelerate the reduction of CO2 emissions from the use of sold products, we introduced a Super Green Product certification system for products with even better energy saving performance. And we are focusing on developing products that meet this standard.
*1 Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment. The basic procedure is to convert the electricity, ultrapure water, exhaust and other utility use into an energy equivalent (kWh) to enable the calculation of the total energy use. Each utility is assigned a priority in the effort to reduce total energy use.
■Green Products as a Percentage of Sales
Certification Standards
■ Green Product
We evaluate the environmental performance of newly developed products against benchmark products.*2 A decrease of 25% or more is used as the reference for energy usage.
*2 Conventional products used as standards for environmental assessments
● Requirements
Evaluate on a scale of 1 to 5 the six aspects of (i) energy saving, (ii) resource conservation, (iii) ease of disassembly, (iv) reuse of resources, (v) environmental protection and safety, and (vi) information availability.
● Certification standards
Must score 2 (on par with a baseline product) or higher for all aspects, and satisfy at least one of the following criteria:
- Average score 3 or higher for all six aspects
- Score 4 or higher for at least one of the following: “energy saving,” “resource conservation” or “environmental protection and safety
- Achieve one of the following:
- Energy Consumption reduced 25% or more
- Material input cut 25% or more
- 100% green procurement rate
■ Super Green Product
● Certification standards
In addition to the green product certification standards, with the energy consumption of products sold in FY2019 as a baseline, the standard for this certification is a reduction of 40% or more per unit of processing area.
Initiatives in Individual Business Fields
Semiconductor Production Equipment Business
Years ended March 31 | Certified products | evaluation standards (1) | evaluation standards (2) | evaluation standards (3) |
2023 | Wafer Pattern Inspection System ZI-3600 | ○ | ○ | ○ |
2021 | Spectroscopic Film Thickness Measurement System VM-2500 | ○ | ○ | ○ |
2018 | Flash Lamp Annealer LA-3100 | ○ | ○ | ○ |
2017 | Spin Scrubber SS-80EX | ○ | ○ | |
Single Wafer Cleaner SU-3300 | ○ | |||
2015 | Direct Imaging System for Advanced Packaging DW-3000 | ○ | ○ | ○ |
2014 | Coat/Develop Track DT-3000 | ○ | ○ | ○ |
Single Wafer Cleaner SU-2000 | ○ | ○ | ||
2013 | Spin Scrubber SS-3200 | ○ | ○ | ○ |
Coat/Develop Track SK-80EX | ○ | ○ | ||
Coat/Develop Track SK-60EX | ○ | ○ | ||
2012 | Single Wafer Cleaner SU-3200 | ○ | ○ | ○ |
Compact Wet Station CW-1500 | ○ | ○ | ○ |
Graphic Arts Equipment Business
Years ended March 31 | Certified products | evaluation standards (1) | evaluation standards (2) | evaluation standards (3) |
2022 | Truepress LABEL 350UV SAI LM | ○ | ○ | |
2021 | Truepress JET 520HD mono | ○ | ○ | ○ |
Truepress LABEL 350UV SAI S/E | ○ | ○ | ||
UV inkjet printing system AT-i2000UV | ○ | ○ | ||
PlateRite Ultima 40000N-Z/S/E | ○ | ○ | ||
2020 | PlateRite Ultima 24000N-Z/S | ○ | ○ | ○ |
Truepress JET 520HD AD | ○ | ○ | ○ | |
PlateRite FX1524N | ○ | ○ | ||
PlateRite FX870N-S/E | ○ | ○ | ||
2019 | PlateRite 8600NⅡ-Z/S/E | ○ | ○ | |
2018 | PlateRite Ultima 16000N-Z/E | ○ | ○ | |
Truepress Jet L350UV+/+LM | ○ | ○ | ○ | |
2017 | Truepress Jet520ZZ Advanced | ○ | ||
PlateRite HD 8900N-Z/S/E | ○ | ○ | ||
Truepress JET 520NX | ○ | ○ | ○ | |
2016 | PlateRite 4600Z/S/E | ○ | ○ | |
2015 | PlateRite 16000N | ○ | ○ | ○ |
Truepress JET 520HD | ○ | ○ | ||
2014 | PlateRite 8600MⅡ-SA/ZA | ○ | ○ | ○ |
2013 | PlateRite 8600MⅡ-S | ○ | ○ | ○ |
2012 | Truepress Jet520ZZ | ○ | ○ | ○ |
Display Production Equipment and Coater Business
Years ended March 31 | Certified products | evaluation standards (1) | evaluation standards (2) | evaluation standards (3) |
2023 | Coater/ Developer SK-2250G | ○ | ○ | ○ |
2021 | Coater/ Developer SK-F1500H |
○ | ||
2020 | Coater/ Developer SK-N1500H |
○ | ○ | ○ |
2019 | Coater/ Developer SK-3033G | ○ | ○ | ○ |
Coater/Dryer RT-T700F |
○ | ○ | ○ | |
2018 |
Coater/ Developer |
○ | ○ | ○ |
Coater/ Developer SK-E1500H |
○ | ○ | ○ | |
2014 | Multi-purpose Coater LC-M1300G | ○ | ○ | ○ |
2013 |
Coater/ Developer SK-N1500G |
○ | ○ | ○ |
2012 | Coater/ Developer SK-2200G | ○ | ○ | ○ |
Coater/ Developer SK-N1300G | ○ | ○ | ○ |
PCB-related Equipment Business
Years ended March 31 | Certified products | evaluation standards (1) | evaluation standards (2) | evaluation standards (3) |
2022 | Direct Imaging System Ledia 7 | ○ | ○ | ○ |
Direct Imaging System Ledia Twin | ○ | ○ | ||
2022 | Defect Verification & Repair System VT-7* *Super Green Product |
○ | ○ | ○ |
2020 | Digital Precision Measurement System FP-9200F | ○ | ○ | |
Digital Precision Measurement System FP-9200S | ○ | |||
2017 | Direct Imaging System Ledia 6 SS/SP/SM/FS/FP/FM | ○ | ○ | ○ |
Automatic Optical Inspection System MIYABI 7 | ○ | ○ | ○ | |
2015 | Defect Verification & Repair System VT-2000F | ○ | ○ | |
Automatic Optical Photomask Inspection System MI-9700 | ○ | ○ | ○ | |
Automatic Optical Inspection System PI-9200F | ○ | ○ | ○ | |
Automatic Optical Inspection System PI-9200H | ○ | ○ | ○ | |
Automatic Optical Inspection System PI-9200S | ○ | ○ | ○ | |
Automatic Optical Inspection System PI-9400 | ○ | ○ | ○ | |
Automatic Optical Inspection System PI-9700 | ○ | ○ | ○ | |
2014 | Digital Precision Measurement System FP-9000 | ○ | ○ | |
Direct Imaging System Ledia 5F | ○ | ○ | ||
Defect Verification & Repair System VT-2000H | ○ | ○ | ||
2013 | Direct Imaging System Ledia 5S | ○ | ||
2012 | Digital Precision Measurement System FP-8200AL | ○ | ||
Work Size PCB Visual Color Inspection System WI-8500 | ○ | ○ | ||
Direct Imaging System LI-9700 | ○ |