Promoting Green Products

The SCREEN Group designates products that meet our own criteria as “Green Products,” and promotes their adoption. To meet growing demand from customers for energy saving at their factories, in the fiscal year ended March 2011, we revised the environmental performance criteria of our products. We also added to our evaluation criteria the power consumption equivalent of exhaust, as well as ultrapure water, nitrogen and other utilities, reflecting the SEMI S231 definition of “equivalent energy.” Furthermore, assessing the environmental performance of products enabled us to generate eco-profiles (based on in-house standards).
In the fiscal year ending March 31, 2020, Green Products comprised 92% of the Group’s total net sales.
1. Guide for energy, utilities and materials use efficiency of semiconductor production equipment. The basic procedure is to convert the electricity, ultrapure water, exhaust and other utility use into an energy equivalent (kWh) to enable the calculation of the total energy use. Each utility is assigned a priority in the effort to reduce total energy use.

■Green Products as a Percentage of Sales

Green Product Certification Standards

We evaluate the environmental performance of newly developed products against benchmark products.2 A decrease of 25% or more is used as the reference for energy usage.
2. Conventional products used as standards for environmental assessments

■Green Product Certification Standards

Evaluate on a scale of 1 to 5 the six aspects of (i) energy saving, (ii) resource conservation, (iii) ease of disassembly, (iv) reuse of resources, (v) environmental protection and safety, and (vi) information availability.

●Certification standards
Must score 2 (on par with a baseline product) or higher for all aspects, and satisfy at least one of the following criteria:

  1. Average score 3 or higher for all six aspects
  2. Score 4 or higher for at least one of the following: “energy saving,” “resource conservation” or “environmental protection and safety
  3. Achieve one of the following:
      - Energy use reduced 25% or more
      - Material input cut 25% or more
      - 100% green procurement rate

Green Product Evaluation

We evaluate the environmental performance of products against benchmark products.2

Initiatives in Individual Business Fields

Semiconductor Production Equipment Business

Status of Green Product Certification

Years ended March 31, Certified products  Energy use reduction rate*1
(performance basis)
2017 Flash Lamp Annealer LA-3100 33%
2016 Spin Scrubber SS-80EX 18%
2014 Direct Imaging System for Advanced Packaging DW-3000 -
2013 Coat/Develop Track DT-3000 63%
Single Wafer Cleaner SU-2000 35%
2012 Single Wafer Cleaner SS-3200 60%
Coat/Develop Track SK-80EX 61%
Coat/Develop Track SK-60EX 53%
2011 Single Wafer Cleaner SU-3200 45%
Compact Wet Station CW-1500 27%

*1 Calculated in accordance with the results of Product Environmental Assessment. 

Example of Green Product Evaluation

■ SU-3200 Single Wafer Cleaning Equipment 

Single Wafer Cleaning Equipment Progress in Reduction of Energy Usage

Based on the energy consumption calculations using SEMI*5 S23*6 we identify where utility use needs to be cut back and work to reduce energy consumption.

Energy Saving sof Single Wafer Cleaning Equipment*7

*5 SEMI (Semiconductor Equipment and Materials International): An international industry organization serving the companies that manufacture products, provide materials and offer services related to semiconductors, displays, nanoscale structures, MEMS and other technologies.
*6 SEMI S23: Guide for conservation of energy, utilities and materials used by semiconductor production equipment.
*7 Comparison of annual energy consumption calculated per wafer on the basis of surface area, with the fiscal year ended March 31, 2001 set as a baseline (=100%).

Graphic Arts Equipment Business

Status of Green Product Certification

Years ended March 31, Certified products  Energy use reduction rate
(performance basis)
Base products 
2019 CTP PlateRite 8600NII-Z/S/E 53% PlateRite 8600N-Z/S/E
2018 CTP PlateRite Ultima 16000N-Z/E 33% PlateRite Ultima 16000N/1600II-E

Digital Printing Truepress Jet L350UV+/+LM

43% Truepress Jet350UV
2017 Digital Printing Truepress Jet520ZZ Advanced 37% Truepress Jet520ZZ
CTP PlateRite HD 8900N-Z/S/E 31% PlateRite HD 8900Z/S/E
Digital Printing Truepress Jet520NX 37% Truepress Jet520
2016 CTP PlateRite 4600Z/S/E 73% PlateRite 43000Z/S/E
2015 CTP PlateRite 16000N 63% PlateRite 16000II
Digital Printing Truepress Jet520HD 70% Truepress Jet520
2014 CTP PlateRite 8600MⅡ-ZA/SA 20% PlateRite 8600SL+built-in bridge
2013 CTP PlateRite 8600MⅡ-S 20% PlateRite 8600M-S
2012 Digital Printing Truepress Jet520ZZ 15% Truepress Jet520
Digital Printing Truepress JetSX - Truepress 344N

Example of Green Product Evaluation

■ Truepress Jet520NX Digital Printing System 

Making the PlateRite 8600 Series of Plate Recorders More Environmentally Friendly

Trends in PlateRite 8600 series electricity consumption (SCREEN measurements)

Gentle on the environment

We assess the environmental impact of all our products as a form of design review. The PlateRite 8600NⅡ series has been developed with the goals of minimizing energy use and environmental impact while maximizing safety

  • Energy use during operation is reduced by up to 60%.*
  • A power-saving mode allows energy savings during idling.
  • Energy use during standby is reduced by up to 73%.* (When using power-saving mode)
  • All models are compatible with chemical-less plates from a range of manufacturers.
  • The use of a registration punch-less system cuts running costs.

* A comparison of the PlateRite 8600 and PlateRite 8600NII-Z when used as standalone systems. The test involved imaging high-sensitivity material of 1,030 x 800 mm (40.5" x 31.4") at 2,400 dpi. As power consumption is also affected by the operating environment and other external factors, the above values cannot be guaranteed.

Display Production Equipment and Coater Business

Status of Green Product Certification

Years ended March 31, Certified products  Energy use reduction rate
(performance basis)
Base products 
2012 Coater/ Developer SK-N1500G 10% SK-1500G
2011 Coater/ Developer SK-2200G(LL) 56% SK-2200G(LC)
Coater/ Developer SK-N1300G(LC) 58% SK-750G(LC)

Example of Green Product Evaluation

■ SK-N1500G Coater/Developer 

Making the SK Series of Coater/Developers for Display Production More Environmentally Friendly

We are helping to make production more environmentally friendly by reducing the amount of resources used in manufacturing processes and making these processes more energy efficient. We are also working proactively on the development of environmental technologies for new products.

*1 A devices that applies photoresist evenly onto a glass substrate, an LCD structural component, allowing highly precise TFT patterns to be formed.
*2 Assumptions for calculation: Comparison of initial model with most recent model of equivalent performance (calculated on the basis of unit processing area)

PCB-related Equipment Business

Status of Green Product Certification

Years ended March 31, Certified products  Energy use reduction rate
(performance basis)
Base products 
2017 Direct Imaging System Ledia 6F M/P/S, Ledia 6S M/P/S 28~38% Ledia 5 
Automatic Optical Inspection System MIYABI 7 58% PI-9200H
2015 Defeat Verification & Repair System VT-2000F  - VT-2000
Automatic Optical Photomask Inspection System MI-9700 87% MI-8500
Automatic Optical Inspection System PI-9200F 75% PI-8300
Automatic Optical Inspection System PI-9200H 34% PI-9000
Automatic Optical Inspection System PI-9200S 60% PI-8300
Automatic Optical Inspection System PI-9400 79% PI-8400
Automatic Optical Inspection System PI-9700 76% PI-8500 
2014 Digital Precision Measurement System FP-9000  - FP-8200AL
Direct Imaging System Ledia 5F 58~62% LI-9700
Defeat Verification & Repair System VT-2000H  - VT-2000
2013 Direct Imaging System Ledia 5S 62~72% LI-9200
2012 Digital Precision Measurement System FP-8200AL  - FP-8000AL
Work Size PCB Visual Color Inspection System WI-8500 68% WI-8000
Direct Imaging System LI-9700W 70% LI-8500

Example of Green Product Evaluation

■ Ledia6FM Direct Imaging System 

PCB-related Equipment Business

Making the Ledia Direct Imaging System More Environmentally Friendly

Ledia 5’s exceptional performance was recognized with the receipt of a JMF’s President Award from the Japan Machinery Federation at the organization’s 36th Energy-Efficient Machinery Awards in 2016.
With new regulations expected for the mercury lamps widely used by the industry, we succeeded in developing UV LED models that offered improved environmental friendliness. These units replaced the super-pressurized mercury lamps used as light sources in conventional direct imaging equipment.
The new lamps extended the service life of the light source by around eight times and also dramatically reduced the replacement frequency and resources consumed by replacement components.