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Exposure System

DI

Ledia 6/6H
Direct Imaging System
LANZAN
Direct Imaging System

Inspection System

AOI

MIYABI 7
Automatic Optical Inspection System
PI-9700
Automatic Optical Inspection System
PI-9200F
Automatic Optical Inspection System
PI-9200H
Automatic Optical Inspection System
PI-9200S
Automatic Optical Inspection System
PI-9400
Automatic Optical Inspection System
MI-9700
Automatic Optical Photomask Inspection System
VT 2000 Series
Defect Verification & Repair System
VT-1850
Defect Verification & Repair System

AVI

FP-9200
Automatic Final Visual Inspection System

Software

CU-9000
Setup Station
Sentflow
Defect Tabulation Software

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