The most ideal direct imaging equipment
for various semiconductor package substrates
by starting with FC-CSP
NEW ReleaseLarge sizes
We also offer models* in sizes of up to 32 inches that retain the exposure quality of smaller sizes. These variants are also suitable for use in applications that involve metal masks that demand high render precision and large-format materials such as probe circuit boards.
*LI-7F-L
The finest imaging quality
Effectiveness at higher resolution
Curve pattern getting smoother
Samples
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L/S = 50/50μm
*This is a limited sample exposed under the conditions, whitch specified By SCREEN
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L/S = 40/40μm
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L/S = 8/8μm
*This is a limited sample exposed under the conditions, whitch specified By SCREEN
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L/S = 7/7μm
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8μm line
*This is a limited sample exposed under the conditions, whitch specified By SCREEN
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7μm line
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SRO = 80μm
*This is a limited sample exposed under the conditions, whitch specified By SCREEN
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SRO = 40μm
New function! Design matching, enabling highly accurate alignment!
Can be used even if it is not a Point symmetric figure and Any pattern can be used as an alignment mark.
3 wavelengths LED technology
3 wavelength LEDs technology
Precise quality control by flexible wavelength mixture technology
3 wavelength LED technology
Easy to optimize best condition for every material with exposure power control
Various alignment method
Scan alignment
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マーク撮影時に
ステージを止めない
-
ステージの往路・復路で
マークを撮像する
-
隣りのマークもカメラ視野に
入れる場合一度に撮像
Further speed-up will be possible by using simultaneous reading of neighbor marks
Alignment algorithm
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Global
Rectangle
-
Multiple points & Whole area
Linear
Curvw
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Mark sharing
Sharing alignment mark
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Multiple points & Individual area
Rectangle
Linear
Variety of algorithms achieve optimal alignment
Auto-focus function
Auto-focus and measures for panel warpage
- Auto-focus
- Mechanical clamping unit
- Auto switching for suction area
Supporting board warpage response with auto-focus function and optional mechanism
The idea of automation
- Start
- Change over time
- After calibration
*Calibrate the alignment camera in the same way
Achieving accurate patterning without stopping machine by manual adjustment
The idea of automation
Barcode function
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Single side auto type
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Double side auto type
Traceability control
Compatible with various barcodes
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1D code
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2D code
Achieving high traceability of the entire manufacturing process
2D code imaging function
2D code can be added not only to the board but also to each piece
Automation
The idea of automation ...
Necessary information for automation
Job data and linked Recipe
Production info linked to the board
Achieving the idea of automation in exposure process