Ledia Twin is the best choice for high
quality and maximum productivity
3-wavelength LED light source
SRO = Φ60 μm L / S = 30/30 μm
Position accuracy ± 10 μm
Twin stage
By connecting two units, it is possible to continuously expose the front surface with one unit and continuously expose the back surface with the other unit
Both front and back sides can be exposed with one unit
50% increase in productivity
*Board size is 21inch(X) * 18inch(Y)
*Alignment marks : 4 points as 6.4 seconds
*Calibration not included
The productivity is subject to change without notice.
Multiple surfaces same time
With twin stages, you can efficiently set multiple faces
2sheets left and right
4sheets left and right
Automatic lines with minimal space
Front and back lines can be
installed in this space
Automation Support Functions
Mechanism introduction
Head unit composed of 3 wavelengths of DMD and UV-LED (365 + 385 + 405nm)
Equipped with up to 6 heads like Ledia 6
Achieve exposure conditions suitable for any resist
by freely manipulating 3 wavelengths in % units
Achieves extremely high alignment accuracy
Equipped with various drawing data corrections,
and also follows measurement results
On a specific board, you put multiple sheets on the stage
and can exposed at once.
Follows the warp of the board and always optimizes the focus position
Can be used without following through holes
Correct in real time without pausing the stage
Regularly calibrate the alignment camera, exposure head, etc.
Aligns and achieves accurate patterning