Coater system
Single substrate
Roll to Roll
Vacuum film deposition
CVD
Sputter
EB evaporation system
Dry etcher
Wet process
Single substrate cleaner
Single substrate developer
Single substrate etcher
Single substrate resist stripper
Dryer, Heater
Hot Plate
Vacuum dryer
Exposure
Proximity exposure
Laminator/Delaminator
Roll to Sheet
Single substrate