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Coater system

Coater/Developer, Coater system

for TFT arrays
SK series
for high resolution LTPS-TFTs
SK-N series
for OLED backplane
SK-E series
for Touch Sensor Panel (TSP)
SK-EH series
for Color filter for OLED (AR film)
SK-F series
for PI film for flexible display
SK-P series

Slit Coater

for Semiconductor Package
LC-M550G/750G
Multi-purpose Coater
LC-M series
Research Coater
LC-R300G/400G

Roll to Roll

for LiB
RT-700F/RT-T700F
for R&D
RT-R350F

Vacuum film deposition

with LIATM Plasma technology

Plasma CVD Equipment
VC-R400G/F
Sputter Equipment
VS-R400G/F
Low-Inductance Antenna LIATM（Plasma technology）

EB evaporation system

EB Evaporation System
IBAD series

Wet process

Cleaning Processor
TS series
Wet Etcher
TE series
Resist Stripper
TR series
Developing Processor
TD series

Dryer, Heater

Manual Hot Plate
Vacuum Dry Chamber
VA-R400G

Exposure

Exposure Unit
MA-1000 series

Laminator/Delaminator

Sheet Laminating Processor
RL-500F
Film Laminating Processor
SL-1000G

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