Coater system

Single substrate

Roll to Roll

Vacuum film deposition

CVD

Sputter

EB evaporation system

Dry etcher

Wet process

Single substrate cleaner

Single substrate developer

Single substrate etcher

Single substrate resist stripper

Dryer, Heater

Hot Plate

Vacuum dryer

Exposure

Proximity exposure

Laminator/Delaminator

Roll to Sheet

Single substrate