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Coater system

Single substrate

Single Substrate Coater/Developer
SK series
　
Single Substrate Coater/Developer
SK-N series
Single Substrate Coater/Developer
SK-E series
Single Substrate PI Coater Line for Flexible Display
SK-P series
Single Substrate Coater
LF series
Single Substrate Coater Multi-porpose Coater
LC-M series
Single Substrate Coater Multi-purpose Coater
LC-M550G
Manual Coater
Research Coater
LC-R300G/400G

Roll to Roll

Roll to Roll Coater/Dryer
RT-700F/RT-T700F
Roll to Roll Coater/Dryer
RT-350M/RT-B350M
Roll to Roll Coater/Dryer
RT-R350F

Vacuum film deposition

CVD

Single Substrate Plasma CVD Equipment
VC series
Manual Plasma CVD Equipment
VC-R400G/F

Sputter

Single Substrate Sputter Equipment
VS series
Single Substrate Sputter Equipment
STP-1650
Manual Sputter Equipment
VS-R400G/F

EB evaporation system

Single Substrate EB Evaporation System
IBAD series

Dry etcher

Manual Dry Etching Equipment
VE-R400G

Wet process

Single substrate cleaner

Single Substrate Cleaning Processor
TS series

Single substrate developer

Single Substrate Developing Processor
TD series

Single substrate etcher

Single Substrate Wet Etcher
TE series

Single substrate resist stripper

Single Substrate Resist Stripper
TR series

Dryer, Heater

Hot Plate

Manual Hot Plate

Vacuum dryer

Manual Vacuum Dry Chamber
VA-R400G

Exposure

Proximity exposure

Single Substrate Automatic Exposure System
MA series
Manual Exposure Unit
MA-1000 series

Laminator/Delaminator

Roll to Sheet

Roll to Sheet Laminating Processor
RL-500F

Single substrate

Single Substrate Laminating/Mechanical Delaminating Processor
SL-1000G

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