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  2. SCREEN FT group products

SCREEN FT group products

  • Coater system
  • Vacuum film deposition
  • Wet process
  • Dryer, Heater
  • Exposure

Coater system

Coater/Developer, Coater system

for TFT arrays
SK series
for high resolution LTPS-TFTs
SK-N series
for backplane of high value-added premium displays
SK-E series
for black PDL for OLED
SK-B series
for Touch Sensor Panel (TSP)
SK-EH series
for Color filter for OLED (AR film)
SK-F series
for flexible substrate formation
SK-P series
Coater system for Panel Level Package
Lemotia

Slit Coater

Multi-purpose Coater
LC-M series
Research Coater
LC-R300G/400G

Roll to Roll

for rechargeable batteries
RT-R series

Vacuum film deposition

with LIATM Plasma technology

Plasma CVD Equipment
VC-R400G/F
Sputter Equipment
VS-R400G/F
Low-Inductance Antenna LIATM(Plasma technology)

Wet process

Cleaning Processor
TS series
Wet Etcher
TE series
Resist Stripper
TR series
Developing Processor
TD series

Dryer, Heater

Vacuum Dry Chamber
VA-R400G

Exposure

Exposure Unit
MA-1000 series
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