Coater/Developer SK-B series
for black PDL for OLED
A coater/developer for black PDL (BPDL) formation processes in OLED backplanes. Equipped with BPDL-specific functions, it contributes to the stable mass production of BDPL.
Features
- BPDL for OLEDs is processed on an integrated line from coating to development.
Integrated system control including each component unit such as cleaning, development, coating, baking, etc., as well as in-lined exposure equipment, inspection equipment, etc. Pursue logistics efficiency between units to maximize productivity - Established following specifications to support Line/Space (L/S) for 1.2μm process.
・Full use of mini-environment technologies to effectively control contamination created by suspended particles
・ESD suppressor by conductive member, employment of LevicoaterTM, a levitation transfer type slit coater, and optimized position of ionizers.
・Equipped with LevicoaterTM customized exclusively for BPDL.
・Equipped with a nozzle cleaning mechanism dedicated to BPDL. - Completely automated coating nozzle maintenance enables continuous operations.
- Can be equipped with two nozzles for use with a LevicoaterTM, a levitation transfer type slit coater. Handles the multiple types of resist required for OLED panel production.
- Designed with a “1 by 2” configuration that allows it to interface with two exposure systems. (SK-B2200G)
- The small footprint ensures effective use of limited production space.
- The evolution of the SK series has focused on the efficient use of resources. Conservation of resources supports environment friendly display production.
Specifications
| SK-B1500G | SK-B2200G | |
| Substrate size | G6 1,500x1,850mm |
G8 2,200x2,500mm 2,250x2,600mm 2,290x2,620mm |
| Coater | Levitation transfer typeslit coater 「LevicoaterTM」 | |
| Coating method | Slit coater (Die coater) | |
* Levicoater is a registered trademark and/or a trademark of SCREEN Holdings Co., Ltd.