Single Substrate Coater Multi-purpose Coater LC-M series
- Suitable for all kinds of coating materials, from nano-level thin films to thick films.
- Various piping systems are possible, so the desired film thickness and uniformity can be generated.
- The flexible device configuration responds to various processes, making it optimal for test devices and small-lot production equipment.
- Allows in-line installations with coater/developer.
- A two-nozzle version that can use two different coating materials is also available.
- In addition to coating of the entire surface, stripe coating, intermittent coating and block coating are possible.
- LC-M550G for semiconductor Package.
360 × 465mm or larger
*Linearcoater is a registered trademark and/or a trademark of SCREEN Holdings Co., Ltd.