Multi-purpose Coater LC-M Series

Features

  1. Suitable for all kinds of coating materials, from nano-level thin films to thick films.
  2. Various piping systems are possible, so the desired film thickness and uniformity can be generated.
  3. The flexible device configuration responds to various processes, making it optimal for test devices and small-lot production equipment.
  4. Allows in-line installations with coater/developer.
  5. A two-nozzle version that can use two different coating materials is also available.
  6. In addition to coating of the entire surface, stripe coating, intermittent coating and block coating are possible.
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  7. LC-M550G for semiconductor Package.

 Inheriting Linearcoaters'™ excellent features

【Substrate size】
  360 × 465mm or larger

*Linearcoater is a registered trademark and/or a trademark of SCREEN Holdings Co., Ltd.

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