Coater/Developer SK-N series
Specially designed model for high resolution LTPS-TFTs
This high-spec model was developed on a base of our SK series, with its excellent track record of use for large-sized arrays. It offers the industry's highest level of uniformity in each process: coating, baking and developing, and contributes to the production of high-definition panels like LTPS (low-temperature polysilicon)-TFTs.
Features
- High productivity suited to TFT mass-production.
Integrated system control throughout the line maximizes productivity and efficiency of movement between units. - The coating module features Linearcoater™, a slit-type coating system.
- Completely automated coating nozzle maintenance enables continuous operations.
- The small footprint ensures effective use of limited production space.
- The evolution of the SK series has focused on the efficient use of resources.
Conservation of resources supports environment friendly display production.
【Substrate size】
730 x 920 mm (G4) or larger
* Linearcoater is a registered trademark and/or a trademark of SCREEN Holdings Co., Ltd.