Vacuum Dry Chamber VA-R400G

After coating, the vacuum dry chamber holds the substrates in a low-pressure environment to accelerate drying.


  1. Significant reduction of the footprint thanks to collection of the vacuum pump, electrical box, and operation panel inside the equipment.
  2. Ability to perform low-pressure processing of 10 Pa or less.
  3. Ability to adjust the support height of a substrate.
  4. Control of unevenness and foaming using low-pressure processing that enables the vacuum pressure to be reduced in fixed steps.
  5. Availability of a function for monitoring the pressure wave form.


 Substrate size
W50 x L50 ~ W400 x L500 mm
 Dimensions(W x D x H)
985 x 1,044 x 1,760 mm

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