Coater/Developer SK-EH series
for Touch Sensor Panel (TSP) production
Coater/Developer for Touch Sensor Panel (TSP) production. While supporting the Line/Space (L/S) for 1.2 μm processes, SK-EH series offers industry-leading productivity.
The newly released SK-E2200H for G8 half substrates further improve the productivity of IT panels and automotive displays.
Features
- The SK-E2200H can simultaneously process two G8-half substrates, and the SK-E1500H can process two G6-half substrates.
- Established following specifications to support Line/Space (L/S) for 1.2μm process.
・Full use of mini-environment technologies to effectively control contamination created by suspended particles.
・ESD suppressor by conductive member, employment of LevicoaterTM, a levitation transfer type slit coater, and optimized position of ionizers. - A two-nozzle coater is available for production lines that use multiple types of coating material.
Specifications
SK-E1500H | SK-E2200H | |
Substrate size | G6-half 1,500x925mm |
G8-half 2,200x1,250mm 2,250x1,300mm 2,290x1,310mm |
October, 2022
SCREEN Launches OLED Panel Production Systems for 8th Generation Substrates – SK-E2200G and SK-E2200H Join E Series Lineup –
* Levicoater is a registered trademark and/or trademark of SCREEN Holdings Co., Ltd.