Promoting Super Green Product

We focus on expanding sales of products with high environmental performance that are certified as “Green Products” according to our independent evaluation standards.
We evaluate each product in terms of energy saving, resource conservation, degree of disassembly, recycling, environmental protection and safety, and information availability on a scale of one to five, while seeking to minimize energy consumption associated with the product. We also added to our evaluation criteria the power consumption equivalent of exhaust, as well as ultrapure water, nitrogen and other utilities, reflecting the SEMI S231*1 definition of “equivalent energy.” 
Moreover, to further accelerate the reduction of GHG emissions from the use of sold products, we introduced a Super Green Product certification system for products with even better energy saving performance. And we are focusing on developing products that meet this standard.

*1 Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment. The basic procedure is to convert the electricity, ultrapure water, exhaust and other utility use into an energy equivalent (kWh) to enable the calculation of the total energy use. Each utility is assigned a priority in the effort to reduce total energy use.

 Super Green Products as percentage of total sales

  FY2024/03
Percentage of total sales (%) 0.5%

Boundary: SPE, GA, FT, PE, SETC

Certification Standards

Super Green Product

● Certification standards
In addition to the green product certification standards, with the energy consumption of products sold in FY2019 as a baseline, we set a reduction of 40% or more per unit of processing area as a standard for certifying Super Green Products.

Green Product

We evaluate the environmental performance of newly developed products against benchmark products.*2 A decrease of 25% or more is used as the reference for energy usage.
*2  Conventional products used as standards for environmental assessments

● Requirements
Evaluate on a scale of 1 to 5 the six aspects of (i) energy saving, (ii) resource conservation, (iii) ease of disassembly, (iv) reuse of resources, (v) environmental protection and safety, and (vi) information availability.

● Certification standards
Must score 2 (on par with a baseline product) or higher for all aspects, and satisfy at least one of the following criteria:

  1. Average score 3 or higher for all six aspects
  2. Score 4 or higher for at least one of the following: “energy saving,” “resource conservation” or “environmental protection and safety
  3. Achieve one of the following:
      - Energy Consumption reduced 25% or more
      - Material input cut 25% or more
      - 100% green procurement rate

Certification status

Semiconductor Production Equipment Business

Products

Super Green Product

 
  Certified products
FY2024/03

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Single Wafer Cleaner SU-3400

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Coat/Develop Track RF-300EX

Green Product

  Certified products 
FY2024/03 Single Wafer Cleaner SP-2100
FY2023/03 Wafer Pattern Inspection System ZI-3600
FY2021/03 Spectroscopic Film Thickness Measurement System VM-2500
FY2018/03 Flash Lamp Annealer  LA-3100
FY2017/03 Spin Scrubber SS-80EX
Single Wafer Cleaner SU-3300
FY2015/03 Direct Imaging System for Advanced Packaging
DW-3000
FY2014/03 Coat/Develop Track DT-3000
Single Wafer Cleaner SU-2000
FY2013/03 Spin Scrubber SS-3200
Coat/Develop Track SK-80EX
Coat/Develop Track SK-60EX
FY2012/03 Single Wafer Cleaner SU-3200
Compact Wet Station CW-1500

Graphic Arts Equipment Business

Products

Green Product

  Certified products 
FY2024/03 PleteRite HD 8900NII Z/S/E
FY2022/03 Truepress LABEL 350UV SAI LM
FY2021/03 Truepress JET 520HD mono
Truepress LABEL 350UV SAI S/E
UV inkjet printing system AT-i2000UV
PlateRite Ultima 40000N-Z/S/E
FY2020/03 PlateRite Ultima 24000N-Z/S
Truepress JET 520HD AD
PlateRite FX1524N
PlateRite FX870N-S/E
FY2019/03 PlateRite 8600NⅡ-Z/S/E
FY2018/03 PlateRite Ultima 16000N-Z/E
Truepress Jet L350UV+/+LM
FY2017/03  Truepress Jet520ZZ Advanced
PlateRite HD 8900N-Z/S/E
Truepress JET 520NX
FY2016/03 PlateRite 4600Z/S/E
FY2015/03 PlateRite 16000N
Truepress JET 520HD
FY2014/03 PlateRite 8600MⅡ-SA/ZA
FY2013/03 PlateRite 8600MⅡ-S
FY2012/03 Truepress Jet520ZZ

Display Production Equipment and Coater Business

Products

Green Product

  Certified products 
FY2023/03 Coater/ Developer SK-2250G
FY2021/03 Coater/ Developer SK-F1500H
FY2020/03 Coater/ Developer SK-N1500H
FY2019/03 Coater/ Developer SK-3033G
Coater/Dryer RT-T700F

FY2018/03

Coater/ Developer SK-E1500G

Coater/ Developer SK-E1500H
FY2014/03 Multi-purpose Coater LC-M1300G
FY2013/03

Coater/ Developer SK-N1500G

FY2012/03 Coater/ Developer SK-2200G 
Coater/ Developer SK-N1300G

PCB-related Equipment Business

Products

Super Green Product

 
  Certified products
FY2021/03

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Defect Verification & Repair System VT-7

Green Product

  Certified products 
FY2022/03 Direct Imaging System Ledia 7
Direct Imaging System Ledia Twin
FY2020/03 Digital Precision Measurement System FP-9200F
Digital Precision Measurement System FP-9200S
FY2017/03 Direct Imaging System Ledia 6 SS/SP/SM/FS/FP/FM
Automatic Optical Inspection System MIYABI 7

Advanced semiconductor packaging

Products

Super Green Product

 
  Certified products
FY2024/03

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Direct Imaging System LeVina

Biosciences

Products

Super Green Product

 
  Certified products
FY2024/03

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Imager for cells cultured in 2D/3D Cell3iMager NX