The highest positioning accuracy, excellent drawing quality,outstanding productivity, and all the key features are combined
in this one unit to perform any high-end exposure requirement.
Head calibration is performed while the operator exchanges boards, consistently delivering high accuracy with excellent productivity.
Brilliant precision is achieved through the high reputation of the Constant Calibration System of the Ledia 8F.
Temperature control
A cooling mechanism has been added to optimize
temperature management inside the system.
Furthermore, improving the cooling efficiency of the
drive unit and cutting off heat conduction to the
main body base, provide improvement in imaging
positional accuracy.
Renewed main body platform
A cooling mechanism has been added to optimize
temperature management inside the system.
Furthermore, improving the cooling efficiency of the
drive unit and cutting off heat conduction to the
main body base, provide improvement in imaging
positional accuracy.
Qs has the ideal resolution characteristic for high-end products by achieving the world's finest accuracy with a multiple wavelength direct image system and contributing to the high-end substrates production as well as the next-generation development products.
FCBGA's film type SRφ35μm t=18μm
Photo patternable film to form fine-pitch circuits on package substrates
L/S=7/7μm
L/S=7/7μm
L/S=7/7μm
t=25μm
7μm line
t=25μm
Photo patternable permanent materials for structure fabrication and high aspect ratio patterning.
L/S=40/40μm
t=約100μm
L/S=40/40μm
t=約100μm
20μm line
t=135μm