1. HOME
  2. News
  3. Expanding Water Management Application to Entire Hikone Site Using water management visualization to accelerate environmental impact reduction

News

NEWS

Expanding Water Management Application to Entire Hikone Site Using water management visualization to accelerate environmental impact reduction

October 24, 2024

Kyoto, Japan – October 24, 2024 – SCREEN Semiconductor Solutions Co., Ltd. (SCREEN SPE) has completed its initial assessment of FTD solutions INC’s Water Management Application (WMA) for visualizing water management. This application was implemented at the Hikone Site’s Process Technology Center in October 2023. Going forward, we will expand the WMA to the entire Hikone Site to accelerate advanced initiatives to reduce environmental impact.

As society works toward carbon neutrality, initiatives to reduce pollution and environmental burden have become indispensable. The International Roadmap for Devices and Systems (IRDS) defines water and energy as mutually dependent, highlighting the importance of water management. In the semiconductor cleaning systems that SCREEN SPE develops and manufactures, the increase of processes as a result of continued device scaling has led to increased use of de-ionized (DI) water. For this reason, water reuse and recycling technologies have become important development themes. 

In response to these trends, in October 2023, SCREEN SPE adopted the FTD solutions WMA at the Process Technology Center, its development base at the Hikone Site. The application provides a visual representation of the entire flow of water used for development systems in the cleanroom, including those for cleaning systems and coater/developers. Applying this technology, we have now completed the initial assessment of the WMA as a tool for visualizing the amounts of DI water and chemicals used, as well as wastewater and waste liquids. Going forward, we will work to improve and reinforce water management infrastructure and strategically implement water-saving activities to expand this initiative to the entire Hikone Site. 

SCREEN SPE will continue to accelerate sustainability development efforts and provide systems with advanced environmental performance to the industry. Through such initiatives, we seek to contribute to the realization of a sustainable world. 

 

Initial assessment items at the Process Technology Center 

• Development of a baseline water model 
• Understanding conditions related to water demand and conservation 
• Calibration of water conservation and sustainability KPIs 
• Facility-level impact assessment of operating site water management 

 

Key initiatives going forward 

• Deploying the WMA at other facilities within the Hikone Site 
• Establishing water management standards that can be applied at other sites 
• Infrastructure development, including developing water models that anticipate future sustainability activities and KPI monitoring 
• Strategic planning of water recycling and usage reduction initiatives 

 

Related Information : https://www.screen.co.jp/spe/en/information/spe231005e

Contact:

SCREEN Semiconductor Solutions Co., Ltd.
+81-75-417-2527
screenspe-info@screen.co.jp

Information contained in the news letter are current on the date of publication, but may be subject to change without notice.