Kyoto, Japan – October 5, 2023 – SCREEN Semiconductor Solutions Co., Ltd. (SCREEN SPE) has introduced FTD solutions INC’s Water Management Application (WMA) to visualize water management to accelerate sustainability development. As the company with the top global market share* for semiconductor cleaning systems, which are systems that deal with water, we will accelerate advanced initiatives to reduce the environmental impact.
As society looks to carbon neutrality, initiatives to reduce pollution and stress in the environment have become indispensable. The International Roadmap for Devices and Systems (IRDS) also defines water and energy as mutually dependent matters, making water management an important subject. In the semiconductor cleaning systems that we develop and manufacture, the increase of processes as a result of further scaling for devices has raised the use of de-ionized (DI) water. This is why water reuse and recycling technologies have become important development themes.
In response to these trends, SCREEN SPE has introduced the FTD solutions’ WMA into the Process Technology Center, which is our development base in the Hikone Plant. The entire flow of water used for development systems such as cleaning systems and coater/developers in the clean room will be visible on the application. This allows the visualization of the amount of DI water and chemical liquids used, as well as wastewater and waste liquids, directly contributing to their reduction. We will also work on the sustainability performance of semiconductor manufacturing systems on the Fab level, out of which we hope to make the base data to provide to our customers. The experience of working with WMA at the Hikone Plant will be considered for future optimization of the site water management for our customers. This way we will be able to help our customers leverage the environmental sustainability capabilities of our tools in the context of the entire site water model.
Going forward, we will continue our sustainability development and provide systems with advanced environmental performance to the industry. We will also take on further global warming countermeasures to contribute to the realization of a sustainable society.
* Survey by SCREEN SPE
FTD solutions INC
SCREEN Semiconductor Solutions Co., Ltd.
Information contained in the news letter are current on the date of publication, but may be subject to change without notice.