Kyoto, Japan – November 7, 2023 – SCREEN Semiconductor Solutions Co., Ltd. (SCREEN SPE) has finalized development of its new RF-200EX and RF-300EX coat/develop track systems. Both systems are designed for next-generation power devices and offer both outstanding productivity and a more compact footprint. SCREEN SPE plans to launch the systems in November 2023.
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Demand for next-generation power devices has increased significantly in recent years, particularly for use in electric and self-driving vehicles and other automotive applications as well as in industrial equipment for power control applications. At the same time, growing ecological concerns have made the entire semiconductor industry keenly aware of the need to reduce environmental impact during the manufacturing process. This includes aspects such as greater energy efficiency during equipment operation and decreased use of chemical substances.
With such factors in mind, SCREEN SPE has successfully developed two new coat/develop track systems: the RF-200EX, designed for 150 and 200 mm wafers, and the RF-300EX for 300 mm wafers. These systems inherit a wealth of advanced coat/develop track technologies refined by SCREEN SPE over many years and deliver both outstanding productivity and a smaller footprint. They are also distinctly more environmentally friendly, dramatically reducing resist consumption during wafer coating and electricity consumption throughout the manufacturing process.
In addition, the RF-200EX has been designed to provide greater flexibility in the handling of a variety of production flows and chemicals. The RF-300EX shares this advanced flexibility. As well as supporting a wide selection of wafers ranging from standard to thin, it offers smooth processing of thick film coatings such as polyimide.
With its development of the RF-200EX and RF-300EX, SCREEN SPE has made a major contribution to the stable production of rapidly diversifying next-generation power devices. Going forward, the company is fully committed to meeting the need for more eco-friendly production systems and to supporting further advances in technologies for semiconductor devices.
SCREEN Semiconductor Solutions Co., Ltd.
Information contained in the news letter are current on the date of publication, but may be subject to change without notice.