Single Substrate Coater Multi-purpose Coater LC-M550G/750G
The technology of high-precision slit coating system, the No.1 coater for TFT arrays for LCD worldwide, has been adopted to coater for Fan-out Panel Level Package (FOPLP).
Features
Highly uniform coating for liquid PR/liquid PID
Suitable for high resolution process
Applicable to coating warped panels
Coater/Developer confuguration available for mass production inline configuration with Exposure/TMAH developer
Highly uniform coating for liquid PR/liquid PID
Suitable for high resolution process
Applicable to coating warped panels
Coater/Developer confuguration available for mass production inline configuration with Exposure/TMAH developerSpecifications
| Model name |
LC-M550G
|
LC-M750G
|
| Coating method |
Slit coating (Die coating)
|
|
| Coating chemical |
Platting resist, photosensitive insulting material, PI, PBO, temporary adhesive, mold lubricant
|
|
| Panel |
Glass or mold (For film and foil, please contact us.)
|
|
| Substrate size |
Max. 515x510mm
|
Max. W600xL600mm
|
* Linearcoater is a registered trademark and/or a trademark of SCREEN Holdings Co., Ltd.