Slit-type Coater LC-M550G/750G
The Linearcoater slit-type coating system has been relaunched for manufacuring advanced semiconductor packages.
The technology of high-precision slit coating system, the No.1 coater for TFT arrays for displays worldwide, has been adopted to coater for Fan-out Panel Level Package (FOPLP).
Features
Inheriting the high-precision coating technology of LinearcoaterTM, the No.1 slit coater for display.
Suitable for high resolution process
Applicable to coating warped panels
For mass production, Coater/Dryer or Coater/Developer configuration, inlined with Exposure/TMAH developer, is available.
Main applications
2.1D, 2.3D, 2.xD, FOPLP (Fan-Out Panel Level Package), Organic interposer, RDL (rewiring layer), PID (isolation layer), Plating resist
Basic specifications
| Model name |
LC-M550G
|
LC-M750G
|
| Coating method |
Slit coater (Die coater)
|
|
| Coating chemical |
Plating resist, Photosensitive insulating film, PI (polyimide), PBO, Temporary adhesive, Mold lubricant, Liquid PR (liquid resist)
|
|
| Panel |
Glass or mold (For film and foil, please contact us.)
|
|
| Substrate size |
Max. 515x510mm
|
Max. W600xL600mm
|
* Linearcoater is a registered trademark and/or a trademark of SCREEN Holdings Co., Ltd.