Single Substrate Coater Multi-purpose Coater LC-M550G

The technology of high-precision slit coating system, the No.1 coater for TFT arrays for displays worldwide, has been adopted to coater for Fan-out Panel Level Package (FOPLP). 


  1. f048_1.jpgInheriting the high-precision coating technology of LinearcoaterTM, the No.1 slit coater for display.

  2. f048_2.jpg Suitable for high resolution process

  3. f048_3.jpg Applicable to coating warped panels

  4. f048_4.jpgFor mass production, Coater/Dryer or Coater/Developer configuration, inlined with Exposure/TMAH developer, is available.

Main applications

2.1D, 2.3D, 2.xD, FOPLP (Fan-Out Panel Level Package), Organic interposer, RDL (rewiring layer), PID (isolation layer), Plating resist

Basic specifications

Model name
Coating method
Slit coater (Die coater)
Coating chemical
Plating resist, Photosensitive insulating film, PI (polyimide), PBO, Temporary adhesive, Mold lubricant, Liquid PR (liquid resist)
Glass or mold (For film and foil, please contact us.)
Substrate size
Max. 515x510mm
Max. W600xL600mm

* Linearcoater is a registered trademark and/or a trademark of SCREEN Holdings Co., Ltd. 

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