SCREEN Semiconductor Solutions Co., Ltd.

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  4. ZI-3500

Wafer Pattern Inspection System


Flagship Model Featuring High-resolution Inspection of Wafers up to 300 mm

  • 100mm-300mm

1. High-speed inspection

The ZI-3500 achieves a 50% higher throughput than the previous model, owing to SCREEN's proprietary inspection heads and high-speed image processing engine. Enjoys a high level of productivity regardless of the number or size of chips on the wafer.

2. High-resolution support

A high resolution of 1.0 μm has been added for even mor precise inspection. Also, lenses with different resolutions can be incorporated on the unit simultaneously, easily switchable to one of three levels for the recipe selected.

3. User-friendly operations

Recipes can be created in a short amount of time through simple operations. The wafer size can be changed with the flick of a switch. Also, thin wafers can be handled easily, without replacing the parts in the equipment.