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RF-310A

Coat/Develop Track

RF-310A

Flexible and Adaptable

  • 200-300mm

RF-310A established the 180WPH extension of the highly reliable and productive RF-300A platform foundation.Following upon the Reliable, Fast, Fine and Flexible design concept, the RF-310A integrates various unique technologies to produce high performance for a wide range of coat, develop and bake processes including both dry and immersion lithography.

Reliable

Simple hardware and software enable high reliability.

Fast

High throughput designed for various process flows.

Fine

Features the latest technology for today’s cutting-edge, finer pattern processing.

Flexible

Uses a modular design that is inherently flexible and expandable.
The adaptable equipment design makes it possible to deliver and assemble the RF3 quickly.

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