Products

【Wafer size 200mm】
Our new SS-3200 for 200 mm utilizes our existing model for 300 mm wafers as a platform. The 300 mm system has rapidly established itself as the de-facto standard for high-throughput spin scrubbers.

【Wafer size 100mm ~ 200mm】
Advanced Scrubber Featuring the Same Stability and Reliability as the Highly Regarded SS Series.

【Wafer size 50mm ~ 200mm】
Half the Footprint, 1.5 Times the Productivity! Excellent Cost-Performance!

【Wafer size 150mm ~ 200mm】
High Throughput Batch Cleaning Systems Enable Flexible Line Configurations

【Wafer size 200mm】
Compact Half-pitch and One-bath Batch Cleaning System

【Wafer size 150mm ~ 200mm】
Inherits High-end Single Wafer Cleaning Technology to Deliver Outstanding Cost Performance

【Wafer size 76mm ~ 200mm】
Outstanding functionality and scalability easily handle emerging needs

【Wafer size 100mm ~ 200mm】
Flexibility to Process a Variety of Substrates

【Wafer size 100mm ~ 200mm】
Flexible, Optimized Coating of MEMS with 3D Structures

【Wafer size 125mm ~ 300mm】
Measurement Equipment to Support Electronic Devices for loT.

【Wafer size 100mm ~ 300mm】
High-speed mode achieves a high throughput of 160 WPH, optimal for multipoint measurement of communications devices and other products.

【Wafer size 100mm ~ 300mm】
A desktop model that can be incorporated into production lines

【Wafer size 50mm ~ 300mm】
Microscope model that is ideal for R&D

【Wafer size 100mm ~ 300mm】
Flagship Model Featuring High-resolution Inspection of Wafers up to 300mm

【Wafer size 76mm ~ 200mm】
High-speed, Superior cost performance.