Automatic Optical Inspection System PI-9400

A newly designed glass table model has been added to the PI series, which has seen considerable worldwide success. This extremely versatile, all-in-one system is ideal for a wide range of applications. It provides both reflected and transmitted illumination while maintaining the same inspection algorithms and speed as its predecessors. It is perfect for conventional PCB and mask inspection and also offers through-hole and metal hard mask inspection capabilities with low startup costs.


  1. Mask inspection applications

    The PI-9400 ensures reliable quality by employing transmitted illumination for film mask inspection. Accurate inspection data using CAM data can be set up simply, and high throughput inspection of lines down to 24 μm is also possible.

  2. Through-hole inspection applications

    The PI-9400 employs transmitted illumination to identify conforming holes. In addition to detecting the existence of through holes, arbitrary judgment criteria can be set for design values. This makes it possible to perform conformance inspections for through-hole size depending on quality requirements.

  3. PCB and metal hard mask inspection applications

    The new system provides hybrid inspection using reflected and transmitted illumination. Inspection algorithms for pattern by reflected illumination inherits the technology from conventional models in the popular PI series. As through-hole inspection using transmitted illumination can be performed continuously, the system offers powerful added value for production and supply of more reliable boards.

AOI setup system「EzPreX」

Faster pre-inspection setup without specialized skills

The EzPreX is installed as a standard function, enabling the rapid and automatic setting of optimal values for thickness, alignment, threshold and other parameters. The EzPreX uses a proprietary algorithm to achieve extremely quick and accurate setup. The EzTune is also available, allowing the operator to perform final adjustment while viewing the screen. Used together, these functions greatly reduce operator workload.

Hardware-less Verification System「iSift」

Post-inspection verification of defects can be performed using a network PC. Defect images are displayed as thumbnails in real-time starting with scanned areas, allowing them to be efficiently assessed and classified as accepted or rejected using the mouse. Using this system to sort defects before starting verification in VT series equipment significantly improves processing efficiency and shortens the verification time.