Ledia Twin

Ledia Twin is the best choice for high quality and maximum productivity 3-wavelength LED light source SRO = Φ60 μm L / S = 30/30 μm Position accuracy ± 10 μm

Twin stage

By connecting two units, it is possible to continuously expose the front surface with one unit and continuously expose the back surface with the other unit
Both front and back sides can be exposed with one unit

50% increase in productivity

Multiple surfaces same time

●With twin stages, you can efficiently set multiple faces

Automatic lines with minimal space

Automation Support Functions

Mechanism introduction

●Head unit composed of 3 wavelengths of DMD and UV-LED (365 + 385 + 405nm)
●Equipped with up to 6 heads like Ledia 6
●Achieve exposure conditions suitable for any resist by freely manipulating 3 wavelengths in % units

●Achieves extremely high alignment accuracy
●Equipped with various drawing data corrections, and also follows measurement results
●On a specific board, you put multiple sheets on the stage

●Follows the warp of the board and always optimizes the focus position
●Can be used without following through holes
●Correct in real time without pausing the stage

●Regularly calibrate the alignment camera, exposure head, etc.
●Aligns and achieves accurate patterning