he pinnacle of Ledia series
The highest positioning accuracy, excellent drawing quality,outstanding productivity, and all the key features are combined in this one unit to perform any high-end exposure requirement.
Constant Calibration System
Head calibration is performed while the operator exchanges boards, consistently delivering high accuracy with excellent productivity.
The excellent accuracy platform
Brilliant precision is achieved through the high reputation of the Constant Calibration System of the Ledia 8F.
Temperature control
Feature 1
A cooling mechanism has been added to optimize temperature management inside the system.
Furthermore, improving the cooling efficiency of the drive unit and cutting off heat conduction to the main body base, provide improvement in imaging positional accuracy.
Renewed main body platform
Feature 2
The rigidity of the main frame has been significantly improved compared to previous models. Furthermore, the positioning of components such as the exposure head and alignment unit has been optimized to achieve the ideal platform.
ideal resolution characteristic for high-end products
Qs has the ideal resolution characteristic for high-end products by achieving the world's finest accuracy with a multiple wavelength direct image system and contributing to the high-end substrates production as well as the next-generation development products.
FCBGA's film type SR φ35μm t=18μm
Photo patternable film to form fine-pitch circuits on package substrates
L/S=7/7μm
L/S=7/7μm
L/S=7/7μm
t=25μm
7μm Line
t=25μm
Photo patternable permanent materials for structure fabrication and high aspect ratio patterning.
L/S=40/40μm
t=約100μm
L/S=40/40μm
t=約100μm
20μm line
t=135μm
Achieved the world's highest drawing quality as a broad-wavelength Direct Imaging System. Contributes to the production of high-end substrates and the realization of next-generation development products.
Automation and online-host support (SECS/GEM)
Strengthen integration with production lines to advance smart factory initiatives. Based on the host online concept diagram, achieve real-time control and traceability.
