自動精密露光装置 MAシリーズ

Features

  1. A wide variety of fully automatic proximity exposure systems are available.
  2. Unique optical gap sensor enables quick, accurate, noncontact setting of proximity gap between mask and substrate.
  3. Unique optical edge sensor enables accurate, non-contact alignment with substrate edges.
  4. Original high-speed image processing enables accurate alignment of mask or mask and substrate.
  5. A mask library in which masks can be changed automatically, is available.
  6. Suitable for a wide variety of applications such as LCD, LED, OLED, Color Filter, Touch Sensor and Photovoltaic Cells.

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