Inspection Equipment to Support Electronic Devices for loT.
The ZI-3500 achieves a 50% higher throughput than the previous model, owing to SCREEN's proprietary inspection heads and high-speed image processing engine. Enjoys a high level of productivity regardless of the number or size of chips on the wafer.
A high resolution of 1.0 μm has been added for even mor precise inspection. Also, lenses with different resolutions can be incorporated on the unit simultaneously, easily switchable to one of three levels for the recipe selected.
Recipes can be created in a short amount of time through simple operations. The wafer size can be changed with the flick of a switch. Also, thin wafers can be handled easily, without replacing the parts in the equipment.
Wet Station
Spin Processor
Spin Scrubber
Polymer Removal