1. Optimal for film thickness control on a mass-production line
The VM-3500 uses a light wave interference method to rapidly measure film thickness. This method offers superior performancevs. cost. The VM-3500 also supports optional image recognition functionality to measure specific locations on patterned wafers.
2. Handles a wide range of film thicknesses
The VM-3500 supports both the fitting method and the peak-and-valley method to calculate the film thickness from interference waveforms, up to four layers and over a wide range of thicknesses. Different heads are used to cover a wide range of light, from ultraviolet to near-infrared.
3. Many different film type programs
The VM-3500 offers 25 standard film type programs, and supports the creation of programs for specialized film types and structures with the help of SCREEN's expert engineers.