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SCREEN Semiconductor Solutions Co., Ltd.

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Spectroscopic Film Thickness Measurement System

VM-2200/3200

Multi-function model equipped
with high-speed mode

  • 100-200mm
  • LMBD ACE

1. The VM-2200 series offers high throughput of up to 160 wafers per hour in high-speed mode (during five-point measurement of SiO2 wafers).
*VM-3210 throughput: 100 wafers per hour

2. The VM-2200/3200 series features a log function that supports improved maintenance. SCREEN has also taken advantage of its years of experience in the semiconductor industry to create a design that makes maintenance easy.

3. Recipes are easy to create, and entering optical constants is simple, thanks to SCREEN's experience in the field. The software can be controlled almost entirely using the mouse, and pen touch panel operation is also supported.

4. The VM-2200/3200 series features a space-saving, compact design that makes it easy to fit the units into existing spaces, and makes production line layout much easier.

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