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April 26, 2013

Doc. No.: NR130426E

Screen Accelerates Business Expansion in Market for Semiconductor Wafer Pattern Inspection Systems
Receives Large Order from Major European Device Manufacturer

Kyoto, Japan - April 26, 2013 - Dainippon Screen Mfg. Co., Ltd. has received a major order for its ZI-2000 pattern inspection systems, capable of various types of semiconductor wafer inspections, from the Singapore factory of a key European device manufacturer. Screen intends to use this order as a foothold to accelerate its business expansion in the market for wafer pattern inspection systems, which is experiencing growing demand centered on the power semiconductors used to ensure the high safety levels required for vehicle onboard systems.






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In recent years, the power semiconductor market has undergone a rapid increase in demand thanks to the widespread adoption of hybrid and electric vehicles, as well as solar power and other renewable energy systems. This market grew from a value of $14.2 billion in 2010 to $16.02 billion in 2012, and by 2017 is expected to reach $26.12 billion.* In this market, visual pattern inspection has mainly been used for the power semiconductors installed in vehicle onboard systems. However, with the need to improve reliability becoming increasingly urgent from a safety perspective, device manufacturers require systems that can deliver both higher throughput and comprehensive quality control.

In response to these market trends, Screen developed the ZI-2000 semiconductor wafer pattern inspection system. The ZI-2000 is equipped with features such as a Screen proprietary high resolution lens and inspection algorithm and benefits from the application of advanced image processing technologies accumulated over many years in this field. As a result, the ZI-2000 is able to find defects that previously went undetected. In addition, with the constant requirement for both ever finer circuits and higher productivity, the system has been praised for a configuration that allows it to maintain high speed processing regardless of the size and number of chips on each wafer targeted for inspection. It has also been positively evaluated for its ability to reduce operator workload using features such as automatic defect categorization software equipped with a self-learning function. It is advantages such as these that recently led the Singapore factory of a key European device manufacturer to place a major order for ZI-2000 systems. One of these systems has already been installed and the remainder are scheduled for sequential delivery in the future.

Screen intends to maintain the momentum created by this order and further expand its business in the market for pattern inspection systems, as demand continues to grow based around power semiconductors. At the same time, it also plans to develop solutions that answer various needs experienced by the semiconductor industry and through this to contribute to the expansion of the overall industry.



* Latest Trends and Future Prospects for the Expanding Power Semiconductor Market 2011 to 2012 , Yano Research Institute



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