Products

Wafer Cleaning System

Wet Station

FC-3100
300mm
FC-3100
Wet Station
FC-3000
300mm
FC-3000
Wet Station
WS-820L, WS-820C / WS-620C
200mm
WS-820L, WS-820C / WS-620C
Wet Station
FC-821L
20mm
FC-821L
Wet Station
CW-1500
CW-1500
Compact Wet Station

Spin Processor

SU-3200
 
SU-3200
Single Wafer Cleaner
SU-3100
300mm
SU-3100
Single Wafer Cleaner
SU-3000
300mm
SU-3000
Single Wafer Cleaner
MP-2000
200mm
MP-2000
Spin Processor

Scrubber

SS-3200
300mm
SS-3200
Scrubber
SS-3100
300mm
SS-3100
Scrubber
SS-80BW/SS-W60A
20mm
SS-80BW / SS-W60A
Scrubber

Post-CMP Cleaning

AS-2000
200mm
AS-2000
Post-CMP Cleaner

Polymer Removal

SU-3100
300mm
SU-3100
Single Wafer Cleaner
SU-3000
300mm
SU-3000
Single Wafer Cleaner
SR-2000
200mm
SR-2000
Polymer Remover

Annealing System

LA-3000-F
300mm
LA-3000-F
Flash Lamp Annealer
LA-830
200mm
LA-830
Infrared lamp Annealer

Measurement System

RE Series
RE Series
Ellipsometric Film Thickness Measurement System
VM-2200/3100 Series
VM-2200/3200 Series
Spectrometric Film Thickness Measurement System Lambda Ace
VM-1200 Series
VM-1200 Series
Spectrometric Film Thickness Measurement System Lambda Ace
VM-1020/1030
VM-1020/1030
Spectrometric Film Thickness Measurement System Lambda Ace

Inspection System

ZI-2000
ZI-2000
Wafer Pattern Inspection System

Advanced Packaging Lithography

DW-3000new
DW-3000
Direct Imaging System for Advanced Packaging

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