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PV Equipment
<Thin Film Processing> Measurement System (RE-8000)
<Thin Film Processing>Cleaning/Etching Processor
<Crystal Silicon> PSG Vapor Cleaning Machine
<Crystal Silicon> Texture Processing Equipment
<Crystal Silicon> Raw silicon cleaning Equipment
<Crystal Silicon / Thin Film Prcessing> Slit-type coater
Inert Gas Circulation Refining System
<Crystal Silicon>Batch-type diffusion furnace system for PV

<Thin Fil Processing> Cleaning Processor for PV LS-P Series Etching Processor for PV LE-P Series

<Thin Film Processing>
Cleaning Processor for PV
LS-P Series

Etching Processor for PV
 LE-P Series

Technology cultivated in LCD manufacturing was used to develop PV manufacturing modules for glass substrates with unique wet etching and cleaning technology.

Features

  • Environmentally-conscious, energy-saving design.
  • Compatible with all substrate sizes and thicknesses, up to 2,200 x 2,500mm substrates.
  • Process support system based on know-how from a wide variety of cleaning and etching processes.
  • Equipment design is based on flat panel display manufacturing equipment, for fast setup and reliable operation.
  • Cleaning processor LS-P Series
    Uses a combination of cleaning tools, including low-pressure UV cleaners, roll brushes, sprays, two-fluid sprays, and more, to enable exceptional particle removal.
  • Etching processor LE-P Series
    The combination of a variety of unique spray nozzles enables superior etching for the customer's specific processing needs.