<Thin Film Processing>
- Environmentally-conscious, energy-saving design.
- Compatible with all substrate sizes and thicknesses, up to 2,200 x 2,500mm substrates.
- Process support system based on know-how from a wide variety of cleaning and etching processes.
- Equipment design is based on flat panel display manufacturing equipment, for fast setup and reliable operation.
- Cleaning processor LS-P Series
Uses a combination of cleaning tools, including low-pressure UV cleaners, roll brushes, sprays, two-fluid sprays, and more, to enable exceptional particle removal.
- Etching processor LE-P Series
The combination of a variety of unique spray nozzles enables superior etching for the customer's specific processing needs.