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Inert Gas Circulation Refining System
<Crystal Silicon>Batch-type diffusion furnace system for PV

Inert Gas Circulation Refining System

Inert Gas Circulation Refining System

Inert gas is circulated within an airtight container connected to the main unit, and the moisture and oxygen in the gas are removed to maintain a low concentration of moisture and oxygen within the airtight container. The oxygen is removed using a special catalyst, and the moisture is removed using a special adsorbent. Both the reaction column and the adsorbent column require regeneration, but two columns of each can be installed, if desired, to enable continuous operation, since operators can switch between the columns to regenerate one while production continues with the other (note that for water generating methods, regeneration of the reaction column is not required, so only a single reaction column is used).

Example System

By circulating inert gas within the airtight container, it’s possible to maintain an environment inside the airtight container in which the oxygen concentration is 1 ppm or less and the dewpoint is -76°C or lower.

Specifications/Lineup

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水生成方式 120タイプ 量産用チャンバーシステム 実験用グローブボックスシステム
Water Generating Method 120 Type
Chamber system for mass production
Glove box system for test production