For inspecting ultra-high-precision glass masks and film masks

FEATURES

1. Higher inspection quality
   (1) Ultra-high-precision inspection
   A newly developed digital interpolation technology enables the inspection of masks with line widths as fine as 7.5 μm. There are five inspection modes that ensure faster inspection for line widths ranging from 7.5 μm to 30 μm. This makes the MI-9500 particularly well suited for inspection of today's increasingly high-precision and high-density glass masks and film masks.
   
   (2) Newly developed defect detection algorithm
   A new inspection algorithm has been incorporated to improve the ability to detect fine nicks and protrusions as well as black and white pinholes. This algorithm separates the pattern edges from other areas during inspection, allowing the occurrence of false calls to also be reduced.
   
   (3) Open/short pattern matching inspection
   Open/short pattern matching inspection has been added to enhance the detection capability for open/short defects. After positioning using our unique "comparison using shaking function" technology, the line connection status is investigated by DRC for highly sensitive detection of open/short defects.
   
   (4) Auto-focus function
   An auto-focus function is provided as a standard feature, enabling high-precision inspection.
2. Improved speed
   (1) Faster inspection
   There are five inspection modes that ensure faster inspection for line widths ranging from 7.5 μm to 30 μm.
   
   (2) Faster setup
   Major revisions have been made to the processing for the creation of reference data. In conjunction with this, the speed of data transfer to the image processing board has also been increased. These two changes have significantly sped up the total setup time compared to previous models.
3. Improved operability
   (1) Automatic inspection setup
   With a single scan of the mask being inspected, the MI-9500 can automatically set up the proper board thickness, binary levels, and inspection conditions (for both DRC and PMI). This results in significantly shorter setup times, as compared with the previous model.
   
   (2) Improved inspection area creation function
   To optimize the creation of inspection conditions, a multiple copying function for inspection (or prohibition) areas has been added to the MI-9500. A function that enables scaling and editing of master data and enable data has also been added.
   
   (3) Built-in verification unit
   The MI-9500 features a built-in defect verification unit. This built-in verification unit makes it possible to create a superior inspection system at low cost. The MI-9500 also features a re-verification function that improves operability during the re-verification of past inspection results.
   
   (4) Glass mask setup unit (option)
   The adoption of a transfer roller enables glass masks to be easily positioned in the inspection section. This unit maintains the mask edges and prevents damage to the rear side of the mask pattern as well as the adhesion of dust and contamination. The end result is the performance of more stable and reliable inspection.