Fine pattern measurement featuring high speeds, high accuracy, and high operational efficiency

The DR-5500-FIII is an upgraded model featuring the acclaimed high-precision measurement and stability of the DR-5500-FII in addition to greater expandability. This new digital reader provides all the functions required for automatic measurement in its standard specification, and additional functions to meet customer needs can be selected as options. With this approach, the system is able to offer an impressive tradeoff between cost and effectiveness.
Multi-step grayscale image data processing has further improved both precision and stability, allowing the DR-5500-FIII to be equipped with advanced automatic measurement and image contour normalization functions.
In addition, integration of the Windows XP-based GUI and operation system has significantly increased processing efficiency and enhanced the device's operating environment for both automatic and manual measurement. This further simplifies measurement procedures for printed circuit board patterns, mask film patterns, mask patterns for screen printing, etc., enabling faster execution of processing.
In short, the DR-5500-FIII offers a range of improvements in areas such as support for the next level of finer patterns, utilization of CAD data, and processing of measurement data. These advantages allow it to respond to a wide variety of needs in a wide variety of usage situations.

FEATURES

1. 2D and Z axis measurement functions^*1
   The Z axis measurement function allows the height of an object to be calculated. With this function, it is possible to select the configuration that best suits the object height and required degree of accuracy.
   Note: The Z axis measurement function is a factory option.
2. Offline teaching function^*1
   It is possible to create a measurement program on a separate computer using CAD data. Setting up the program before processing is completed also contributes to increased operational efficiency.
3. Hi-resolution microscope with dual magnification ratios^*2
   This optical system offers improved capacity for measuring high-precision, ultrafine patterns. Line widths of 5 μm or less can be measured with a reproducibility of 50 nm (3σ). In addition, the unit's head, when equipped with a spectroscope, enables the measurement of thin film thickness and transmission factors, etc.
4. Selectable light source
   Both halogen and LED light sources are available. This allows the appropriate light source to be chosen depending on the object to be measured.
5. Temperature control chamber^*3
   A temperature control chamber can be installed for situations in which high-precision measurement is required. The ability to maintain the uniformity of the measurement environment makes it possible to target even higher levels of accuracy.
6. Enhancement of operation software
   A full range of software is available to meet differingcustomer needs.
   • Pattern search function: The registration of a target image allows the specification of high-precision measurement points.
   • Light intensity calibration function: Stable measurement is possible even when the light intensity has been altered.
   • DRD measurement: Measurement programs can be applied simply by inputting a numerical value.
   • User linear correction function^*1: This function decreases the effect of the ambient temperature in theinstallation environment.
   • Acceptance evaluation/statistics functions^*1: A range of applications are available, including assessment of measurement results, creation of inspection result documents, a SPC function, etc.
7. Image processing function
   Screen's proprietary image processing function is able to recognize the difficult to detect edges of printed circuit board patterns and mask patterns for screen printing, etc., allowing the performance of high-precision measurement.

*1 Factory option
*2 Measurement specifications will be created separately.
*3 Measurement accuracy specifications will be created separately.