Cleaning

Array processing
Glass substrates, which will serve as the base material, are cleaned to remove adhered micron-sized particles (dust) and organic residues.

Color filter processing
Glass substrates, which will serve as the base material, are cleaned to remove adhered micron-sized particles (dust) and organic residues.

Cleaner

	TS Series

Film deposition

Array processing
Layers of the material that will become the circuit material are formed (deposited) as thin films on the glass substrates.

Resist Coating

Array processing
Resist (photosensitive chemical) is dispensed from the slit nozzle to uniformly coat the glass substrates.

Color filter processing
Black or color resist (photosensitive chemical) is dispensed from the slit nozzle to uniformly coat the glass substrates.

Coater

	SK Series		SK-N Series
	Linearcoater™ LF Series		Linearcoater™ LC-M Series
	SF Series		RC-353/553-P

Exposure

Array processing
Light is projected onto the substrates to expose the circuit pattern. Only the areas of the resist layer that are exposed to the light undergo a structural change.

Color filter processing
Light is projected onto the substrates to expose the color filter pattern. With the black resist layer, only the areas exposed to the light undergo a structural change.
Conversely, with the color resist layer, only the areas not exposed to the light change.

Proximity Exposure

	MA-6000 Series		PA-6000 Series
	MA-5000 Series		MA-1000 Series

Development

Array processing
The areas that were exposed to the light are dissolved to reveal the thin film.

Color filter processing
The areas that were respectively either exposed or not exposed to the light are dissolved to reveal the pattern.

Developer

	SK Series		SK-N Series

Inspection/Evalution/Measurement System

Measurement System for thin films

	RE-8000

Line Width Measuring System

	DR-8000

Etching

Color filter processing
The thin film not covered with resist is dissolved and removed to form the transistor circuit.

Etcher

	TE Series

Resist Stripping

Color filter processing
The resist layer is stripped off as it is no longer needed for masking.

Resist Stripper

	TR Series

Crystal Filling and Assembly

The space between the substrates forming the transistor circuit and color filter pattern is filled with liquid crystal material. Next, the light polarizers and then the backlights are added to complete the liquid crystal display.