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FPD Equipment > Product > Coater/Developer/Resist Coater > Coater/Developer   SK Series

Coater/Developer   SK Series

No.1 series of coater/developers for large TFT arrays worldwide

SK Series

Feature

  1. Inline with other equipment such as exposure units, titlers, and inspection units is easy.
  2. Features comprehensive system control.
    Maximizes productivity and efficiency of movement between units.
  3. The coating module features Linearcoater™, a slit-type coating system.
  4. The developer module utilizes a puddle developing system, which prevents developer degradation, while minimizing the amounts of circulating chemicals required.
  5. The increase in equipment footprint accompanying larger substrate sizes has minimized.

Substrate size　730 × 920mm up

Resist Coating System Linearcoater®

Superior coating uniformity with efficient resist usage

Linearcoater

Feature

  1. With the slit-type coating system, the efficiency of resist usage is almost 100%.
  2. SCREEN's unique slit nozzle design enables superior coating uniformity even when coating large substrates.
  3. Complete automatic nozzle maintenance makes continuous production possible.
  4. High-speed coating suitable for today's increasingly large substrates.

*Linearcoater is a registered trademark of Dainippon Screen Mfg.Co.,Ltd. in Japan.