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FPD Equipment > Product > Coater/Developer/Resist Coater > Coater/Developer for LTPS   SK-N Series

Coater/Developer for LTPS   SK-N Series

Coater/Developers designed especially for high resolution LTPS (low-temperature poly-silicon TFT)

SK-N Series

Feature

  1. The world's most consistent processing throughout the production process, including coating, baking, and developing.
  2. CO2 microbubbles reduce the relative resistance of DI water using only 0.5% of the CO2 volumes used in the past, and minimize static electricity damage to TFTs.
  3. A two-nozzle coater is available for production lines that use multiple types of coating material.

Substrate size
SK-N750G : 730 × 920mm (Max.)
SK-N1300G : 1,300 × 1,500mm (Max.)