Two-nozzle type (option)

Feature

1. Can be used to coat substrates with all the different types of coating material from 0.1µm thin film to 10µm thick film.
2. Reduces downtime, thanks to its use of a unique cleaning mechanism.
3. A two-nozzle coater is available for production lines that use multiple types of coating material.
4. Allows in-line installations with coater/developer.

Substrate size　360 × 465mm up