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 VM-1200/1300 Series


Spectrometric Film Thickness Measurement System
 VM-1200/1300 Series

Spectrometric Film Thickness Measurement System</br> VM-1200/1300 Series


  1. The CCD image sensor in the spectrometer makes simultaneous measurement possible across the full range of wavelengths in the visible spectrum, as well as high-speed, high-accuracy measurement of film thicknesses.
  2. Recipe wizard function for easy operation
  3. Supports a wide range of measurement data processing functions including 3D mapping, film thickness data compensation, histogram displays, and a range of other statistical tools
  4. Automatic measurement with auto-stage and auto-focus functions
  5. Standard setup capable of measuring the thickness and spectral reflectance of 25 kinds of films. A wide variety of measurement programs are available to support measurements for other film types.
  6. Simultaneous multi-layer measurements for up to 4 layers of film
  7. Capable of performing refractive index measurements
  8. LAN support for easy connections to inter-fab networks (option)

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