- Coat/Develop Track
World-class coat/develop equipment that achieves higher productivity and throughput.
- Wafer Cleaning System
Wafer cleaning system for a wide range of production processes.
- Annealing System
Advanced annealing system with Dainippon Screen’s proprietary technology.
- Measurement System
Highly accurate measurement system that supports a wide range of wafer sizes.
- Inspection System
Inspection system used in a wide variety of processes from in-process inspections to final visual inspections.
- Advanced Packaging Lithography
Advanced packaging lithography equipped with a wide variety of options.
- Green Device
Environmentally friendly products that contribute to the realization of a low-carbon society.