In line with “Environmental, Safety, and Health Activities” which summarizes our stance on EHS, the SCREEN Group regularly assesses its activities to ensure full compliance with EHS-related regulations. The evaluations are carried out twice a year utilizing regulatory registration tables and compliance assessment and outcome reports. This process also covers the legal requirements for chemical substances. Environmental, Safety, and Health Activities
Complying with Legislation of Chemicals and High Pressure Gases
Following revisions to the Industrial Safety and Health Law, it became mandatory to perform risk assessments of hazardous chemicals. Accordingly, SCREEN introduced a management system for chemicals and high-pressure gases to improve the management level. We perform thorough risk assessments of chemicals for new uses and have been working to implement inventory management.
In accordance with Japan’s Pollutant Release and Transfer Register（PRTR）Law, we report the volumes of chemical substances such as hydrogen fluoride and its water-soluble compounds handled and emitted at Hikone Plant.
In addition, we perform both spot and regularly scheduled inspections of all relevant equipment in accordance with Fluorocarbon Emission Control Law. In the fiscal year ended March 2023, none of our facilities detected fluorocarbons leakages beyond the reporting standards.
Complying with Product Legislation
SCREEN is committed to sustainable management based on a policy of delivering products that take safety and the global environment into consideration. This approach is included in our EHS management framework. To satisfy environmental legislation requirements in different countries, we quickly share regular updates through the Product EHS subcommittee, which operates under the Group EHS Committee, and closely support the efforts of individual operating companies to maintain full compliance with environmental regulations for products.
We also perform regular assessments at related Group companies to ensure compliance with product legislation. The evaluations are carried out twice a year using regulatory registration tables and compliance assessment and outcome reports. Our latest evaluation, for the period ending March 31, 2023, confirmed our full compliance with all relevant laws.
In response to the EU’s REACH chemical regulations and other laws, we conduct surveys of substances of very high concern (SVHC) throughout the entire supply chain using chemSHERPA, an IT format for substance surveys. In addition, in response to product laws and regulations, we revised our Green Procurement Standards in the fiscal year ended March 31, 2023 to ban the inclusion of newly prohibited substances in procured items. Green Procurement Standards
Managing Environmental Risks
Hikone Plant Scrubber (exhaust cleaning device)
Advanced scrubbers (exhaust cleaning devices) are installed at all laboratory and research facilities handling the chemical substances used by our semiconductor production equipment business. After contaminants have been removed from the exhaust gas, it is discharged into the outdoor air. Facility staff are also working to reduce risk factors by regularly analysing exhaust particles and inspecting equipment.
Undiluted waste liquid generated at production bases is collected in tanks and undergoes treatment as industrial waste. Liquid waste from water cleaning is purified to our own voluntary standard, which is stricter than legally mandated, using wastewater treatment equipment.
Regarding discharged effluent, we conduct environmental impact assessments using whole effluent toxicity (WET) tests* that ascertain impacts on organisms. Wastewater treatment facilities use a 24-hour monitoring system, and the presence of fireflies in the downstream areas of rivers into which the purified water is discharged demonstrates the effectiveness of our approach. In addition, we set up emergency tanks to take on polluted water during emergencies and built systems to ensure pollutants are not discharged offsite.
*Whole effluent toxicity, a wastewater management technique that uses biological assays to make a comprehensive assessment of the impact of chemical substances contained in rivers, public water supplies, and industrial wastewater.
Chemical Leakage Training
Chemical leakage drill, Rakusai Site
Hikone Plant, Yasu Plant, Rakusai Site and other facilities handling chemicals conduct regular training on how to clean up leakages of substances with different characteristics. The frequently repeated drills ensure employees can respond quickly even if an accident unexpectedly occurs.
Managing Soil and Groundwater Contamination Risks
Above-ground waste liquid piping, Hikone Plant
Hikone Plant is the main manufacturing base for SCREEN’s semiconductor and display production equipment businesses. The facility uses above-ground piping to handle any waste liquid requiring purification as a measure to prevent contamination of soil and groundwater.
As the waste liquid is transported via the above-ground piping as far as the treatment equipment, employees can visually monitor conditions and respond quickly in the event of an emergency. The piping system is also inspected regularly to minimize any risk of a leakage.
Embankment around waste treatment systems, Hikone Plant
Embankments have been created around the locations of storage tanks for chemicals that require waste treatment processing. These areas have also been made chemical resistant. Even if a leak does occur, the structure means no harmful substances leave the site.
Groundwater Observation Wells
Groundwater observation wells, Yasu Plant
Yasu Plant is equipped with groundwater observation wells to improve its chemical handling. Employees perform regular water quality surveys to confirm there is no contamination.
